Principle Contractor: KLA-Tencor Corporation
Department: Defense Advanced Research Projects Agency
Contract Details: KLA-Tencor Corp., San Jose, Calif., is being awarded a $5,500,000 increment of a $97,205,968 other transaction for prototypes agreement for the Nanowriter program to develop a maskless lithography prototype tool for 45 nanometer node and below. Work will be performed in San Jose (92 percent) and Fremont, Calif. (8 percent) and is expected to be completed September 2012. Funds will not expire at the end of the current fiscal year. DARPA issued the Microsystems Technology Office-Wide solicitation in Federal Business Opportunities on January 16, 2007, and 73 proposals were received. The contracting activity is the Defense Advanced Research Projects Agency, Arlington, Va. (HR0011-07-9-0007).
Total Contract Value: $5,500,000
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