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KLA-Tencor Corporation - Defense Advanced Research Projects Agency

Defense contract under the Defense Advanced Research Projects Agency awarded to KLA-Tencor Corporation on 9/28/2007.

Per the U.S. DoD, * Indicates a "small business" classification and ** indicates a "small disadvantaged business". NOTE: the U.S. DoD only publicly reports contracts valued at $6.5 million USD or greater. The contract language is EXACTLY as it appears on the official U.S. DoD website ( unless otherwise noted.

Principle Contractor: KLA-Tencor Corporation

Department: Defense Advanced Research Projects Agency

Contract Details: KLA-Tencor Corp., San Jose, Calif., is being awarded a $5,500,000 increment of a $97,205,968 other transaction for prototypes agreement for the Nanowriter program to develop a maskless lithography prototype tool for 45 nanometer node and below. Work will be performed in San Jose (92 percent) and Fremont, Calif. (8 percent) and is expected to be completed September 2012. Funds will not expire at the end of the current fiscal year. DARPA issued the Microsystems Technology Office-Wide solicitation in Federal Business Opportunities on January 16, 2007, and 73 proposals were received. The contracting activity is the Defense Advanced Research Projects Agency, Arlington, Va. (HR0011-07-9-0007).

Total Contract Value: $5,500,000

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